$CM_FORMAT JEOL/EO
$CM_VERSION 1.00
$CM_COMMENT CRS_FSA_UIZ
$CM_DATE 2023-01-09
$CM_TIME 14:25:38
$CM_OPERATOR General
$CM_INSTRUMENT InTouchScope
$CM_ACCEL_VOLT 10
$CM_MAG 3500
$CM_SIGNAL SED
$CM_STAGE_POS 7.679 -5.585 10.004 0.000 0.000
$CM_STAGE_X 7.679
$CM_STAGE_Y -5.585
$CM_STAGE_T 0.000
$CM_STAGE_Z 10.004
$CM_STAGE_R 0.000
$$SM_MICRON_MARKER 5m
$$SM_FILM_NUMBER 0
$$SM_TITLE 
$$SM_WD 10
$$SM_SPOT_SIZE 30
$$SM_VACUUM 0
$$SM_PHOTO Marche
$$SM_MERGE 
$$SM_SIGNAL1 
$$SM_SIGNAL2 
$$SM_MULTI 
$$SM_VAC_MODE HV
